This paper is focused on a novel design of stepped diaphragm for MEMS capacitive pressure sensor used in tire pressure monitoring system. The structure of sensor diaphragm plays a key role for determining the sensitivity of the sensor and the non-linearity of the output.First the structures of two capacitive pressure sensors with clamped square flatdiaphragms, with different thicknesses are inv...

In this paper modeling of capacitance and sensitivity for MEMS capacitive pressure sensor is presented. In capacitive sensor the sensitivity is proportional to deflection and capacitance changes versus pressure. Therefore first the diaphragm displacement, capacitance and sensitivity of sensor with square diaphragm have been modeled and then simulated using finite element method (FEM).  It can b...

Abstract   In this paper analytical analysis of capacitive pressure sensor with clamped diaphragm is presented. Mechanical and electrical properties of the sensor are theoretically analyzed based on theory of thin plates with small deflection and the results are evaluated by use of finite element analysis. The central deflection and capacitance values under uniform external pressure are calcula...

Flexible Capacitive Pressure Sensor with Microstructure Array for Human Pulse Sensing 1. Abstract In this project, we designed a capacitive pressure sensor for blood pressure and human pulse detection using flexible copper film and PDMS [dielectric] microstructure sandwich structure. We observed a linear relation between force and change in capacitance and detected a human pulse [pressure]. Thi...

This paper presents a resonant-based read-out circuit for capacitive pressure sensors. The proposed read-out circuit consists of an LC oscillator and a counter. The circuit detects the capacitance changes of a capacitive pressure sensor by means of frequency shifts from its nominal operation frequency. The proposed circuit is designed in 0.18μm CMOS with an estimated power consumption of 43.1mW...

This paper proposes a Micro-electro-mechanical (MEMS) capacitive pressure sensor that relies on the movable electrode displaced like a flat plate equal to the maximum center deflection of diaphragm. The diaphragm, movable electrode and mechanical coupling are made of polysilicon, gold and Si3N4, respectively. The fixed electrode is gold and the substrate is Pyrex glass. This proposed method inc...

As the core component of the sense of touch, flexible pressure sensors are critical to synchronized interactions with the surrounding environment. Here, we introduce a new type of flexible capacitive pressure sensor based on a template of electrodes, with a one-dimensional pyramid micropatterned structure on a Polydimethylsiloxane (PDMS) substrate and a dielectric layer of polystyrene (PS) micr...

Nine Degrees of Freedom (9 DOF) systems are already in development in many areas. In this paper, an integrated pressure sensor is proposed that will make use of an already existing monolithic 9 DOF inertial MEMS platform. Capacitive pressure sensors can suffer from limited sensitivity for a given size of membrane. This novel pressure sensor design increases the sensitivity by over 5 times compa...

This paper presents the design of a high-performance dualband wireless capacitive pressure sensor operating in harsh environment. The proposed design is composed of an absolute capacitive pressure sensor, pressure controlled oscillator (PCO), class-E power amplifier (PA) and an antenna. The sensor node collects and transmits the pressure variation in the term of frequency output wirelessly to a...